Application Support
Best application support is provided by SENTECH’s highly qualified application experts. In our well-equipped application laboratories of more than 150 m2 they develop new solutions for projects' or customers’ requirements. Interesting tasks are generalized to open up new fields of application for SENTECH products.
Contact our experts for:
- Quick advice by e-mail or telephone
- Device demonstrations
- Processing of customer samples
- User training at SENTECH or at the customers’ site
- Contract measurements,
etch / deposition orders of greater amount
Atomic Layer Deposition
Dr Paul Plate
Phone: +49 30 6392 5637
Fax: +49 30 6392 5522
E-mail: ALD@sentech.de
Plasma Process Technology
Dr Marcel Schulze
Phone: +49 30 63 92 5546 / 5524
Fax: +49 30 6392 5522
E-mail: support@sentech.de
Thin Film Metrology
Mr Sven Peters
Phone: +49 30 6392 5521
Fax: +49 30 6392 5522
E-mail: support@sentech.de
Equipment:
- ICP-RIE systems (fluorine etching, methane hydrogen processes, chlorine chemistry)
- PECVD systems (dielectric layer deposition)
- ICPECVD systems (for much lower temperatures)
- ALD system (thermal and plasma enhanced atomic layer deposition)
- Spectroscopic ellipsometer, scanning electron microscope, profilometer
(for sample characterization)
Equipment:
- Spectroscopic ellipsometers
(spectral range190 nm to25 μm) - Reflectometers (
400 nm to2 μm) - Laser ellipsometers (different configurations)
- Special sensor arrangement for the measurement on thin film solar cells